摘要：本文论述了关于IC制造中使用的工艺气体和厂房设施、生产设备的危害及防护.
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Acta Mechanica Sinica Acta Geologica Sinica Acta Metallurgica Sinica Acta Geologica Sinica Acta Pharmacologica Sinica Acta Mechanica Solida Sinica Acta Oceanologica Sinica Applied Mathematics and Mechanics The Journal of China Universities of Posts and Telecommunications Applied Mathematics:A Journal of Chinese Universities 东北大学学报·社会科学版 浙江大学学报·理学版