摘要:绝缘体上硅(SOI,silicon-on-insillator)作为CMOS的改进技术.于1978年被推出,这种技术能够提高器件速度、降低功耗、减小软误差、抗锁定、减化制造工艺,以及减小器件尺寸。SOI材料最初是用于小规模的利基fniche)市场,主要是军用。而今,已明显扩展了在主流方面的应用。最近几年.SOI已用于各种前沿的集成电路,诸如微处理器、服务器、智能电源(smart power),以及射频信号处理器,一般用部分耗尽的(PD,partially depleted)硅层。
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