摘要:采用RF磁控溅射技术在石英衬底上生长了厚度可调的锐钛矿相TiO_2薄膜,继而采用光刻技术在薄膜上生长了Ag叉指电极,获得了MSM结构TiO_2基紫外探测器。I-V特性测试结果表明,Ag与TiO_2之间表现出优良的欧姆接触特性,所制备探测器为欧姆接触。此外,TiO_2薄膜厚度对探测器的光电性能影响显著,当薄膜厚度达到197 nm时,光电性能达到最高。此时,光电流高出暗电流近2.5个数量级,紫外光区的响应度高出可见光区近2个数量级。所制备Ag/TiO_2MSM紫外探测器表现出明显的光敏性和可见盲特性。
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