摘要:精工爱普生公司(Seiko Epson)与JSR公司共同开发了一种采用液态涂布和喷墨成形工艺的硅薄膜。这种硅薄膜是一种低温多晶硅TFT(薄膜晶体管),其性能可与采用传统CVD(化学气相沉积)方法生产的薄膜相媲美。这种新型材料是一种氢和硅的高级硅烷混合物,它可以被有机溶剂溶解。
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