摘要：研究了PtSi—SBD的结构和光产额。由光产额模型可知，采用薄PtSi光腔结构和降低肖特基势垒可提高量子效率。利用光的共振吸收模型，通过计算机模拟计算表明，引入抗反射层，优化光腔结构可以大大提高光的吸收率。同时，PtSi膜厚在1～2nm时，PtSi—SBD的量子效率系数最大。
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